| 000 | 00427nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 230929s2006||||xx |||||||||||||| ||und|| | ||
| 082 |
_a8271 2/5 620.5 _bLEO-M |
||
| 100 | _aLeondes, Comelius T. | ||
| 245 | 0 | _aMEMS/NEMS: Handbook Techniques and Applications: Volume-2 Fabrication Techniques | |
| 260 |
_aUSA _bSpringer _c2006 |
||
| 300 | _axviii, 332p. | ||
| 650 | _aFabrication Techniques | ||
| 650 | _aMEMS/NEMS | ||
| 942 | _cBK | ||
| 999 |
_c2294 _d2294 |
||