000 | 00441nam a2200157Ia 4500 | ||
---|---|---|---|
008 | 230929s2006||||xx |||||||||||||| ||und|| | ||
020 | _a9780387245202 | ||
082 |
_a8270 1/5 620.5 _bLEO-M |
||
100 | _aLeondes, Comelius T. | ||
245 | 0 | _aMEMS/NEMS: Handbook Techniques and Applications: Volume-1 Design Methods | |
260 |
_aUSA _bSpringer _c2006 |
||
300 | _axviii, 38op. | ||
650 | _aDesign Methods | ||
650 | _aMEMS/NEMS | ||
942 | _cBK | ||
999 |
_c2293 _d2293 |