000 00441nam a2200157Ia 4500
008 230929s2006||||xx |||||||||||||| ||und||
020 _a9780387245202
082 _a8270 1/5 620.5
_bLEO-M
100 _aLeondes, Comelius T.
245 0 _aMEMS/NEMS: Handbook Techniques and Applications: Volume-1 Design Methods
260 _aUSA
_bSpringer
_c2006
300 _axviii, 38op.
650 _aDesign Methods
650 _aMEMS/NEMS
942 _cBK
999 _c2293
_d2293