| 000 | 00394nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 230929s2013||||xx |||||||||||||| ||und|| | ||
| 020 | _a9780849312625 | ||
| 082 |
_a7701 1/1 621.381 _bLYK-M |
||
| 100 | _aLyshevski, Sergey Edward | ||
| 245 | 0 | _aMEMS and NEMS: Systesm, Devices and Structures | |
| 260 |
_aFlorida, USA _bCRC Press _c2013 |
||
| 300 | _a461 | ||
| 650 | _aMEMS & NEMS | ||
| 942 | _cBK | ||
| 999 |
_c2292 _d2292 |
||