| 000 | 00385nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 230929s2008||||xx |||||||||||||| ||und|| | ||
| 020 | _a9780470083017 | ||
| 082 | _a621.381 | ||
| 100 | _aHsu, Tai Ran | ||
| 245 | 0 | _aMEMS and Microsystems: Design, Manufacture and nonoscale engineering | |
| 250 | _a2d | ||
| 260 |
_aNew Jersy USA _bJohn Wiley _c2008 |
||
| 300 | _axxv, 550 | ||
| 942 | _cBK | ||
| 999 |
_c2290 _d2290 |
||