TY  - BOOK
AU  - Leondes, Comelius T.
TI  - MEMS/NEMS: Handbook Techniques and Applications: Volume-3 Manufacturing Methods
U1  - 8272 3/5 620.5 
PY  - 2006///
CY  - USA
PB  - Springer
KW  - Manufacturing Methods
KW  - MEMS/NEMS
ER  -