TY  - BOOK
AU  - Leondes, Comelius T.
TI  - MEMS/NEMS: Handbook Techniques and Applications: Volume-1 Design Methods
SN  - 9780387245202
U1  - 8270 1/5 620.5 
PY  - 2006///
CY  - USA
PB  - Springer
KW  - Design Methods
KW  - MEMS/NEMS
ER  -