TY  - BOOK
AU  - Lyshevski, Sergey Edward
TI  - MEMS and NEMS: Systesm, Devices and Structures 
SN  - 9780849312625
U1  - 7701 1/1 621.381 
PY  - 2013///
CY  - Florida, USA
PB  - CRC Press
KW  - MEMS & NEMS
ER  -