TY  - BOOK
AU  - Lyshevski, Sergey Edward
TI  - MEMS and NEMS: Systems, Devices, and Structures
SN  - 9780849312625
U1  - 7702 1/2 621.381 
PY  - 2013///
CY  - Florida, USA
PB  - CRC Press
KW  - MEMS & NEMS
ER  -