MEMS/NEMS: Handbook Techniques and Applications: Volume-3 Manufacturing Methods
Leondes, Comelius T.
MEMS/NEMS: Handbook Techniques and Applications: Volume-3 Manufacturing Methods - USA Springer 2006 - xviii, 434p.
Manufacturing Methods
MEMS/NEMS
8272 3/5 620.5 / LEO-M
MEMS/NEMS: Handbook Techniques and Applications: Volume-3 Manufacturing Methods - USA Springer 2006 - xviii, 434p.
Manufacturing Methods
MEMS/NEMS
8272 3/5 620.5 / LEO-M