MEMS/NEMS: Handbook Techniques and Applications: Volume-2 Fabrication Techniques
Leondes, Comelius T.
MEMS/NEMS: Handbook Techniques and Applications: Volume-2 Fabrication Techniques - USA Springer 2006 - xviii, 332p.
Fabrication Techniques
MEMS/NEMS
8271 2/5 620.5 / LEO-M
MEMS/NEMS: Handbook Techniques and Applications: Volume-2 Fabrication Techniques - USA Springer 2006 - xviii, 332p.
Fabrication Techniques
MEMS/NEMS
8271 2/5 620.5 / LEO-M