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MEMS and NEMS: Systesm, Devices and Structures

Lyshevski, Sergey Edward

MEMS and NEMS: Systesm, Devices and Structures - Florida, USA CRC Press 2013 - 461

ISBN: 9780849312625

Subjects--Topical Terms:
MEMS & NEMS

Dewey Class. No.: 7701 1/1 621.381 / LYK-M

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